Table 1 of
Paterson, Mol Vis 2023; 29:87-101. Table 1 of
Paterson, Mol Vis 2023; 29:87-101.
Table 1. Spin coater settings for photoresist distribution during wafer fabrication.
| Velocity (RPM) | Ramp (RPM) | Time (s) |
|---|---|---|
| 500 | 100 | 10 |
| 1200 | 300 | 30 |